NANO 2260 Micro-Nano Fabrication Techniques (2-2-4)
This course introduces the theory and fabrication techniques of micro/nano devices. It covers the theory of basic processing techniques, such as diffusion, oxidation, photolithography, chemical vapor deposition, physical vapor deposition. Students will be taught the various processing techniques used to micro/nano fabricate, theory of the individual processes, how these processes are characterized, and the interrelationship of these processes when combined to fabricate devices.