ME 538 Fundamentals of MEMS and Microsystems
The underlying principles of physics, mechanics and materials science as they apply to MEMS will be covered and coupled closely with the basic and applied aspects of microsystems engineering. Case studies involving the design, operation, fabrication and packaging of MEMS devices will be presented throughout the class. Also offered for undergraduate-level credit as ME 438 and may be taken only once for credit.
Prerequisite
senior or graduate standing.